Finlanda: Single wafer plasma asher tool
Data licitatiei 20.01.2025
Expirat
2
2
| Valoare estimata : 0
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Tip anunt:
UE
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ID: 9109276
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Data publicarii :
20.12.2024
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Tara/Judet:
FI |
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Descriere scurta:
Finlanda: Single wafer plasma asher tool
Coduri CPV:
38000000-5 - Echipamente de laborator, optice şi de precizie (cu excepţia ochelarilor)
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Textul licitației
ilicon semiconductor front-end, the tool must be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (bulk strip, HDIS, Descums) The Single wafer asher tool will be used in silicon photonics devices, quantum devices, radiation detectors, and MEMS devices, which are the main product lines in the research fab. The object of the tender process is described in more detail in the invitation to tender documents.Identificatorul procedurii: e3b75c26-414c-4ab1-8ba9-e0c90ea707ccIdentificator intern: 75/206/2024Tip de procedură: DeschisăProcedura este accelerată: nuPrincipalele caracteristici ale p