Textul licitației

equest the supply of a Total Reflection X-ray Fluorescence (TXRF) Analysis Spectrometer for non-destructive, trace-level wafer surface contamination analysis, with automated handling and rapid full-wafer mapping. The system must support routine monitoring on 100 mm and up to 200 mm wafers and be compatible with bare and processed wafers including thin films, epitaxial layers, and compound semiconductor substrates. The Spectrometer must be suitable for in a research cleanroom environment, with robust software control, recipe management, and data export.Identificatorul procedurii: c76a70a4-c969-4bc6-81fe-496db4c07d49Tip de procedură: DeschisăProcedura este accelerată: nu2.1.1. ScopNatura contractului: ProduseClasificarea principală (cpv): 38000000 Echipamente de laborator, optice şi de precizie