Data licitatiei 13.01.2025

Expirat

Olanda: XUV Piezo Cluster
Data licitatiei 13.01.2025
Expirat
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Valoare estimata : 1,900,000 EUR Tip anunt: UE ID: 8955517 Data publicarii : 11.11.2024 Tara/Judet: OL
Descriere scurta:

Olanda: XUV Piezo Cluster

Coduri CPV:

38000000-5 - Echipamente de laborator, optice şi de precizie (cu excepţia ochelarilor)

Textul licitației

ll be used for the deposition of pure metals, metallic oxides and piezoelectric layers onto various substrates to be further processed using photolithography and deposition steps in the MESA+ Nanolab facilities. Brief description of the capabilities is outlined below:   The XUV Piezo Cluster shall be capable of processing at least 200 mm diameter substrates.   The XUV Piezo Cluster shall include a chamber for deposition of piezoelectric Pb(Zr,Ti)O3 (PZT) layer that acts as the active layer for sensor and actuator applications.   The XUV Piezo Cluster shall include a chamber or chambers for deposition of pure metals such as Pt, gold (Au) or conductive metal oxides such as LaNiO3 or SrRuO3 layers. The XUV Piezo Cluster shall have the capability to sputter the typically used Ti, Ta or Cr adhesion layers preceding the pure metal layers.  The XUV Piezo Clust

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