Textul licitației

ment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore provide a high degree of flexibility, reproducibility, process stability and automation. For Technical details see part III Lot 2 Explanation To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) system is required which can handle substrates of at least 100 mm size. The PVD system will be shared between the photonics research group (PRG) and liquid crystals and photonics (LCP) research groups to deposit a wide range of (mostly) metal or dielectric thin films. Included in the assignment is the start-up and installation of the tool, as well as a load-lock for faster loading of the samples and training by the equipment provider. A 100 mm PVD thin film deposition system, with both e-gun evaporation and